G.W. Burr, K. Virwani, et al.
VLSI Technology 2012
An improved version of the commonly employed C. C. Teng and H. I. Man (Appl. Phys. Lett. 56, 1734 [1990]) measurement technique is illustrated by the characterization of films of a new high glass transition temperature polyurea. Measurements taken in the transmission mode are shown to be free from non-negligible errors introduced by interference effects present in standard reflection geometry measurements. © 1996 American Institute of Physics.
G.W. Burr, K. Virwani, et al.
VLSI Technology 2012
Y. Levy, M. Jurich, et al.
Journal of Applied Physics
C. Poga, Paul M. Lundquist, et al.
Applied Physics Letters
J.I. Thackara, M. Jurich, et al.
Journal of the Optical Society of America B: Optical Physics