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Rheologica Acta
The instrumental requirements, spectral processing and interpretation for spatially resolved electron energy loss scattering appropriate for electronic structure determinations are reviewed. As an example, the recent Si L2, 3 absorption spectra obtained with 0.2 eV resolution in GeSi alloy layers 5-50 nm thick are discussed. © 1992.
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
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Materials Research Society Symposium - Proceedings
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SPIE Advanced Lithography 2007