A. Krol, C.J. Sher, et al.
Surface Science
Results are presented detailing the crystallographic quality of a number of metal films deposited by epitaxial sputter deposition. Such films have single-orientation f.c.c., h.c.p., b.c.c. and hybrid crystal structures, and include the elements Ag, Au, Co, Cr, Cu, Fe, Rh, Ru, Pd and V. The crystal structure was characterized using X-ray diffraction analysis.
A. Krol, C.J. Sher, et al.
Surface Science
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting