Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
This work concludes the presentation of methods for evaluation of integrals required in electron-atom scattering using an analytic basis set. Methods are presented for the calculation of exchange integrals between spherical Bessel functions and exponential functions. For reasons of relative speed and applicability, six different methods are presented. Features of each are discussed and a scheme is described for selecting the most desirable method for a given case. © 1973.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Fausto Bernardini, Holly Rushmeier
Proceedings of SPIE - The International Society for Optical Engineering
L Auslander, E Feig, et al.
Advances in Applied Mathematics
Ligang Lu, Jack L. Kouloheris
IS&T/SPIE Electronic Imaging 2002