Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The solution of the quantum‐mechanical one‐particle problem involving a Coulomb potential with a cut‐off contains Whittaker functions, difficult to evaluate individually. However, the energy expression involves a ratio of two contiguous Whittaker functions, and the entire ratio is easily expressed as a convergent continued fraction. Representative energy eigenvalues are calculated, correcting the errors due to an earlier Bessel function approximation by Wannier. Copyright © 1977 John Wiley & Sons, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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JES
Eloisa Bentivegna
Big Data 2022
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