Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
Investigations are carried out to characterize Cu deposition from a solid target using a XeCl, 28 ns pulse width, excimer laser at energies between 2 - 15 J/cm2. Scanning electron microscope (SEM) studies of the target surface revealed sputtering effects, droplet formation and surface waves. Density per unit substrate area of droplet-like-Cu particles transferred from the target is a function of frequency, deposition time, state of the target surface and power density. Mass and charge collected at the substrate are obtained as a function of distance to the target. Mass deposition as a variation of laser beam to target angle, facetting angle at feature edges and grain size as a function of substrate bias were measured. Fill shape evolution of micron size holes are obtained. An energy threshold for Cu-ion generation is extrapolated from the measured ion current vs. energy in.
Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
Imran Nasim, Michael E. Henderson
Mathematics
Jianke Yang, Robin Walters, et al.
ICML 2023