Shu-Jen Han, Satoshi Oida, et al.
DRC 2013
The technological need for characterization of scaled nano-devices is not paralleled with the availability of methods to measure heat flux and temperature on small scales. To measure local temperature and conductance variation we therefore focus on developing measurement tools. These are based on (A) scanning a thermometer across the sample surface region of interest, so called scanning thermal microscopy (SThM), (B) measuring thermal properties directly through self-heating, and (C) measuring directly the heat-flux through 1D-structures.
Shu-Jen Han, Satoshi Oida, et al.
DRC 2013
Pei Zhao, Wan-Sik Hwang, et al.
IEDM 2013
Wan Sik Hwang, Amit Verma, et al.
DRC 2013
Bernd Gotsmann, Fabian Menges, et al.
DRC 2013