Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
We study a class of explicit or implicit multistep integration formulas for solving NXN systems of ordinary differential equations. The coefficients of these formulas are diagonal matrices of order N, depending on a diagonal matrix of parameters Q of the same order. By definition, the formulas considered here are exact with respect to y =-Dy + 4>(x, y) provided Q-hD, h is the integration step, and
1, the coefficients of the formulas are given explicitly as functions of Q. The present formulas are generalizations of the Adams methods (Q = 0) and of the backward differentiation formulas (Q). For arbitrary Q they are fitted exponentially at Q in a matricial sense. The implicit formulas are unconditionally fixed-ft stable. We give two different algorithmic implementations of the methods in question. The first is based on implicit formulas alone and utilizes the Newton Raphson method; it is well suited for stiff problems. The second implementation is a predictor-corrector approach. An error analysis is carried out for arbitrarily large Q. Finally, results of numerical test calculations are presented. © 1974, American Mathematical Society.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
George Markowsky
J. Math. Anal. Appl.
Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
W.F. Cody, H.M. Gladney, et al.
SPIE Medical Imaging 1994