Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
We consider the question of finding an extreme value for some function of the eigenvalues of the differential equation y″ + λφ(x) y = 0,y(0) = y(1) = 0, as φ(x) varies over a region in a function space. A characterization of the φ(x) at which the function of the eigenvalues achieves its extremum is derived. © 1979.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
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