I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
This paper presents the fabrication and characteristics of a magnetically actuated micromechanical scanner/stage with five degrees of freedom (X, Y, Z, and tilt about the X and Y axes) intended for use as a compact positioning device in parallel scanning probe applications. The entire scanner has a volume of 30×30×2 mm3. It shows a DC displacement amplitude to drive current ratio of 330 nm/mA along the X and Y axes, of 50 nm/mA along the Z axis, and has a resonant frequency in the X/Y plane of 61 Hz.
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films