Oliver Schilter, Alain Vaucher, et al.
Digital Discovery
An innovative method for fabrication and rapid prototyping of high-aspect ratio micromechanical components in photoresist is discussed. The photoresist is an epoxynegative-tone resist, called SU-8, which can be structured to more than 2 mm in thickness by UV exposure. Small gears of 530 μm in diameter and 200 μm in thickness have been realized in this photoplastic and their functionality has been demonstrated. In addition a process called MIMOTEC™ (MIcroMOlds TEChnology) has been established for the fabrication of metallic micromolds. MIMOTEC™ is based on the use of the SU-8 spun on high thicknesses and electrodeposition of nickel. Thermoplastic microcomponents have been injected and mounted in watches.
Oliver Schilter, Alain Vaucher, et al.
Digital Discovery
Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Frank Stem
C R C Critical Reviews in Solid State Sciences