P.M. Will, K. Pennington
Artificial Intelligence
Defect enhancement in semiconductor wafers is shown to be possible by spatial frequency filtering-without the necessity for filter alignment. The technique depends on the wafer being sufficiently periodic. Coherent optical and digital computer simulation results are presented. © 1971 Optical Society of America.
P.M. Will, K. Pennington
Artificial Intelligence
K. Pennington, J.S. Harper
Applied Optics
Yi-Hsin Chen, Fred Mintzer, et al.
ICASSP 1985
K. Pennington, E. Simonyi, et al.
SPIE OE/LASE 1989