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Photomask and Next-Generation Lithography Mask Technology 2004
A general class of algorithms for the numerical solution of partial differential equations is considered. The structure and properties of the algorithms make them particularly easy to implement. Numerical comparisons of the algorithms are included. © 1971 by Academic Press Inc. (London) Limited.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
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Mathematics of Computation