Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
A general class of algorithms for the numerical solution of partial differential equations is considered. The structure and properties of the algorithms make them particularly easy to implement. Numerical comparisons of the algorithms are included. © 1971 by Academic Press Inc. (London) Limited.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
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