Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A major drawback of the set-theoretic solid model is the global and non-unique way in which it is defined. In a recent paper, Rossignac and H.B. Voelcker introduced the concept of the active zone of primitive or submodel, which provides a localization of a set-theoretic model which is useful for a number of purposes. We present a more general, but simplified, definition of the active zone which exploits the properties of the symmetric difference operator. We also outline a novel application of the active zone to the interactive graphical editing of set-theoretic solid models.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Rafae Bhatti, Elisa Bertino, et al.
Communications of the ACM
Xinyi Su, Guangyu He, et al.
Dianli Xitong Zidonghua/Automation of Electric Power Systems