Heights and positions of maxima of partially coherent images of clear lines

Douglas S. Goodman; Joseph E. Gortych

doi:10.1364/AO.33.002069

Applied Optics

Paper

01 Apr 1994

Heights and positions of maxima of partially coherent images of clear lines

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Abstract

For the partially coherent imaging of narrow clear lines, the image maximum relative to the nominal and the lateral shift of the maximum is considered as a function of pupil phase. © 1994 Optical Society of America.

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Condenser aberrations in Köhler illumination

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Line ratio and image formation in photolithographic projectors

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