Conference paper
MODEL SYSTEMS IN THE STUDY OF ETCHING MECHANISMS.
F.R. McFeely, J.F. Morar, et al.
Symposium on Plasma Processing 1986
Paper
High resolution synchrotron excited soft X-ray core level spectroscopy at NSLS
Abstract
Examples of soft X-ray core level excitations studies are presented which span a range from excitons of the diamond C 1s level and intermediate products of the silicon fluorine etching reaction to the interface structure of CaF2 grown epitaxially on silicon (111) surfaces. © 1987.
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