E. Burstein
Ferroelectrics
Large arrays of micro-cantilevers operating in parallel are essential for achieving high throughput in such applications as life sciences, nanofabrication and semiconductor metrology. A novel intermittent-contact mode operation is presented that is suitable for such applications. The cantilevers are electrostatically actuated. The oscillation amplitude is kept small to enable high-frequency operation and to reduce the tip-sample interaction force, and thus the tip and sample wear. Input shaping of the actuation signal is employed for high-speed reliable operation in the presence of the tip-sample adhesion forces. The deflection signal is sampled once per oscillation cycle to enable high-speed imaging. Experimental results are shown which demonstrate the efficacy of the proposed scheme. In particular, during continuous high-speed imaging, the tip diameter is maintained over a remarkable 140m of tip travel. © 2010 IOP Publishing Ltd.
E. Burstein
Ferroelectrics
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sung Ho Kim, Oun-Ho Park, et al.
Small