Zhiguo Li, Robert J. Baseman, et al.
IEEE Trans Semicond Manuf
Optically stimulated electron emission (OSEE) measurements may be used to monitor a variety of surface properties. To take full advantage of the potential of such measurements, well-defined reference surfaces are required to serve as calibration standards and for use in comparative studies. Here we describe the use of freshly cleaved highly oriented pyrolytic graphite as a reference surface. With the most elementary protocol of peeling the surface with adhesive tape, surfaces with OSEE currents varying by ±3.5% may be produced. By taking into account sample thickness changes with repeated use, variations should be reduced to on the order of ±1% routinely.
Zhiguo Li, Robert J. Baseman, et al.
IEEE Trans Semicond Manuf
Igor Y. Khandros, Robert J. Baseman, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Yada Zhu, Robert J. Baseman, et al.
ISSAT-RQD 2012
Robert J. Baseman, Fateh A. Tipu, et al.
SPIE Advanced Lithography 2021