J.F. DeGeolormo, D.K. Sodana, et al.
JES
No abstract available.
J.F. DeGeolormo, D.K. Sodana, et al.
JES
A.W. Kleinsasser, T.N. Jackson
Physical Review B
Patrick J. McNally, Lisa S. Cooper, et al.
Applied Physics Letters
C.M. Ransom, P. Spirito
Symposium on Plasma Processing 1986