Conference paper
SHORT-TIME ANNEALING OF DRY-ETCHING DAMAGE.
C.M. Ransom, T.O. Sedgwick, et al.
ECS Meeting 1983
No abstract available.
C.M. Ransom, T.O. Sedgwick, et al.
ECS Meeting 1983
T.I. Chappell, C.M. Ransom
Review of Scientific Instruments
S.L. Wright, P. Solomon, et al.
Applied Physics Letters
H. Baratte, A.J. Fleischman, et al.
JES