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PaperAn electron paramagnetic resonance study of electron injected oxides in metal-oxide-semiconductor capacitorsL.P. Trombetta, G.J. Gerardi, et al.Journal of Applied Physics
PaperLow-temperature deposition of high-quality silicon dioxide by plasma-enhanced chemical vapor depositionJ. Batey, E. TierneyJournal of Applied Physics
PaperPlasma-enhanced CVD of high quality insulating filmsJ. Batey, E. Tierney, et al.Applied Surface Science
