Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
First-principles electronic structure calculations and multiple-angle valence-band photoelectron spectroscopy were combined to image a clean surface-related electronic state of the Cu(001) surface. The surface band cresting at 4.30 eV below the Fermi level was computed to have a density of states at the lower end of the bulk Cu d bands. Based on the results of first-principles calculations for the clean and Cl-covered surfaces, we were able to successfully measure the surface state by taking a ratio of clean versus Cl-covered isoenergetic valence electron angular distributions. We have also carried out first-principles total-energy calculations for the multilayer atomic relaxation of the clean Cu(001) surface, and found that the topmost interlayer separation contracts by 2.9% relative to the bulk value, while the second interlayer is essentially unchanged and the third interlayer contracts by only 0.1%. © 1996 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
Hiroshi Ito, Reinhold Schwalm
JES
Eloisa Bentivegna
Big Data 2022