C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
An energy analyser is described for measuring the energy of the secondary electrons in the scanning electron microscope. It consists of a 63°deflection cylindrical analyser followed by an electron collimator. This is simpler than a mirror design reported previously and gives a higher transmission factor and less defocusing of the electron beam of the microscope. This analyser has been applied to measure point-to-point variations in surface potential with an accuracy to ±1 V.
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
T. Schneider, E. Stoll
Physical Review B