Conference paper
Characterization of line width variation
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SPIE Advanced Lithography 2000
We briefly review recent progress in elucidating the time-independent critical behavior of systems with infinite numbers of static absorbing states, and show that the critical exponent describing the decay with time of the order parameter right at the critical point is the same as that of the directed percolation problem.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
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ISIT 2003
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Quantum Machine Intelligence