Conference paperElectron beam fabrication and characterization of fresnel zone plates for soft x-ray microscopyD. Kern, P. Coane, et al.Proceedings of SPIE 1989
Conference paperElectron beam testing and its application to packaging modules for very large scale integrated (vlsi) chip arraysF.J. Hohn, T.H.P. Chang, et al.Proceedings of SPIE 1989
Paper1 µm MOSFET VLSI Technology: Part VI― Electron-Beam LithographyWarren D. Grobman, Hans E. Luhn, et al.IEEE JSSC
Conference paperAn experimental high-density memory array fabricated with electron beamH.N. Yu, R.H. Dennard, et al.ISSCC 1973
