Xiaoping Liu, Richard M. Osgood, et al.
CLEO 2010
We report the performance of NiSi-based heaters integrated with submicrometer silicon waveguides. The heaters were fabricated using a standard complementary metal-oxide-semiconductor (CMOS) silicidation process on a thin silicon slab laterally connected with a silicon rib waveguide. The intrinsic properties of such NiSi waveguide heaters were characterized by using them as thermo-optic phase shifters in a MachZehnder interferometer. The power consumption Pπ for obtaining a π phase shift was measured to be as low as 20 mW, using CMOS-compatible drive voltages. The time constant of the thermo-optic response was less than 2.8 μs. Simulations suggest that a further reduction in the power consumption Pπ is feasible. © 2010 Optical Society of America.
Xiaoping Liu, Richard M. Osgood, et al.
CLEO 2010
Benjamin G. Lee, Fuad Doany, et al.
OFC 2010
Michael L. Cooper, Greeshma Gupta, et al.
CLEO 2011
Yurii A. Vlasov, Fengnian Xia, et al.
CLEO 2008