Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Under steady-state conditions, we have observed an increase of photo-conductivity in Ge at low temperature simultaneously with radiation from electron-hole drops. A set of rate equations for a 3-phase system of carriers, free excitons and drops are used to interpret the results. Values of the exciton-recombination coefficient and the lifetimes of the three phases are determined. © 1974.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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