Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The extent of imidization was determined as a function of depth in films of the deuterated version of a model polyimide precursor, polyamic ethyl ester (d-PAE), using a novel ion beam analysis technique. Monitoring the loss of the deuterated ethyl moiety provided a precise means of evaluating the extent of imidization f as a function of the temperature of imidization and time at the imidization temperature. The imidization reaction was found to proceed uniformly as a function of depth down to 700 nm below the surface. The imidization kinetics followed a two-stage sequence in which the initial rate of imidization was rapid, up to f values of ca. 0.6, whereupon the reaction rate diminished sharply. © 1990.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Dipanjan Gope, Albert E. Ruehli, et al.
IEEE T-MTT
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990