C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
Paper
Low temperature CVD garnet growth
Abstract
Epitaxial garnet films of Er3Fe5O12, (Eu, Y)3Fe5O12 and (Eu, Yb)3Fe5O12 which exhibit submicron magnetic stripe domains have been chemically vapor deposited (CVD) on non-magnetic garnet substrates. The deposition process which uses metal organic source compounds was carried out at relatively low temperatures, 800-1000°C. Both stress induced and growth induced magnetic anisotropy have been produced in the films, the latter of which was observed for the first time in CVD garnet films. © 1979.
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