G.W. Burr, K. Virwani, et al.
VLSI Technology 2012
We report magnetic patterning of ferrimagnetic CrPt3 films by locally suppressing the magnetic order using ion-beam irradiation. Chemically-ordered CrPt3 films grown on MgO(110) single-crystal and amorphous SiNx substrates are ferrimagnetic and exhibit strain-induced uniaxial magnetic anisotropy. X-ray diffraction confirms the formation of the L12 phase and magneto-optical Kerr effect spectroscopy reveals the theoretically expected dependence of Kerr rotation and ellipticity on photon energy. Irradiation of the films with 700 keV N+ ions at doses ≲6 × 1016 ions/cm2 transforms the chemically-ordered CrPt3 ferrimagnetic alloy into the chemically-disordered nonmagnetic fcc phase. As a result, ordered CrPt3 layers can be patterned into magnetic and nonmagnetic regions and are candidate material for ion-beam-patterned magnetic recording media. © 2001 American Institute of Physics.
G.W. Burr, K. Virwani, et al.
VLSI Technology 2012
Olav Hellwig, Taryl L. Kirk, et al.
Nature Materials
J.E.E. Baglin, A.J. Kellock, et al.
MRS Spring Meeting 1998
J.E.E. Baglin, C.T. Rettner, et al.
SPIE Optical Science and Technology 2001