Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The anisotropic susceptibility Δχ of SbCl5-graphite intercalation compounds (GIC) has been studied for stages 2, 3, 4 and 5 in the temperature range from 4.2 K to 300 K. The orbital susceptibility χorb, | (H | c-axis) is diamagnetic for stages, 2, 3, 4 and 5. χorb, | increases slightly up to the stage 4 and then decreases considerably at the stage 5. Anomaly of Δχ with a temperature hysteresis has been observed in the temperature range from 225 K to 260 K. The magnitude of its anomaly increases with increasing the stage number. This result suggests the existence of the hybridization of carbon and intercalant molecule orbitals. © 1985.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R. Ghez, J.S. Lew
Journal of Crystal Growth
Sung Ho Kim, Oun-Ho Park, et al.
Small
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999