M.B. Small, R.M. Potemski
Proceedings of SPIE 1989
M.B. Small, R.M. Potemski
Proceedings of SPIE 1989
Hang-Yip Liu, Steffen Schulze, et al.
Proceedings of SPIE - The International Society for Optical Engineering
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009