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SPIE Photomask Technology + EUV Lithography 2011
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
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SPIE Advanced Lithography 2008
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SPIE OE/LASE 1992
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994