Jaap Kautz, J. Jobst, et al.
Scientific Reports
Measurement of chromatic aberration in a Low Energy Electron Microscope (LEEM) or Photo Electron Emission Microscope (PEEM) is necessary for quantitative image interpretation, and for accurate correction of chromatic aberration in an aberration-corrected instrument. While methods have been developed for measuring the spherical aberration coefficient, C 3 , measuring the chromatic aberration coefficient, C c , remains a more difficult task. Here a novel method is introduced to simplify such measurements. The viability and accuracy is demonstrated using detailed electron-optical ray-tracing calculations. Experimental results show that the method is easily reduced to practice.
Jaap Kautz, J. Jobst, et al.
Scientific Reports
J. Jobst, A. J.H. van der Torren, et al.
Nature Communications
Rudolf M. Tromp, S.M. Schramm
Ultramicroscopy
J. Jobst, Jaap Kautz, et al.
Nature Communications