William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
The phenomenon of slow amorphization during a constant-temperature and constant-pressure thin-film reaction is explained by a kinetic model emphasizing the rate of transition. We assume that the reaction obeys a maximum time-dependent rather than time-independent negative free-energy change. The product persists in the metastable state due to a high activation barrier to later transition. An amorphous Rh-Si alloy formed by thermally reacting a crystalline Rh thin film and single-crystal Si is reported. © 1991 The American Physical Society.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
P. Alnot, D.J. Auerbach, et al.
Surface Science
T. Schneider, E. Stoll
Physical Review B
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989