Simon Gaudet, Koen De Keyser, et al.
JVSTA
The thermally induced solid-state reaction between a 10-nm-thick Ni film and a Si(001) substrate was investigated using in situ x-ray diffraction and ex situ pole figure analyses. The reaction begins with the appearance of orthorhombic Ni2 Si grains characterized by a strong fiber texture. The formation of the metastable hexagonal θ phase-which inherits the fiber texture of Ni2 Si -is then observed. This phase has been observed in every sample studied regardless of dopant, film thickness, deposition method, and anneal profile (>2000 conditions). Texture inheritance allows a reaction pathway with a lower activation energy than the expected formation through thermodynamically stable Ni silicide phases. © 2010 American Institute of Physics.
Simon Gaudet, Koen De Keyser, et al.
JVSTA
Simon Gaudet, Christian Lavoie, et al.
ISTDM 2006
J.A. Kittl, M.A. Pawlak, et al.
Applied Physics Letters
Pierre Turcotte-Tremblay, Matthieu Guihard, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures