Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
J. LaRue, C. Ting
Proceedings of SPIE 1989
A. Skumanich
SPIE OE/LASE 1992
Ruixiong Tian, Zhe Xiang, et al.
Qinghua Daxue Xuebao/Journal of Tsinghua University