Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A microscopic free energy function for antiferroelectrics has been derived as a power series in a complete set of order parameters which are the thermal averages of normal coordinates whose wave vectors form a group G. Furthermore it has been shown that the wave vectors of the non-zero order parameters at all the extrema of the free energy form subgroups of G and that there will always be a net polarization in the antiferroelectric phase. The general discussion is illustrated by application to the antiferroelectric transition of PbZrO3. © 1967.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
B.A. Hutchins, T.N. Rhodin, et al.
Surface Science
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008