Jean-Marc Halbout, Paul May, et al.
Journal of Modern Optics
Jean-Marc Halbout, Paul May, et al.
Journal of Modern Optics
Paul May, Jean-Marc Halbout, et al.
IEEE T-ED
George Chiu, Jean-Marc Halbout, et al.
Microlithography 1987
G.V. Treyz, P.G. May, et al.
Applied Physics Letters