Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Multiple scattering theory (MST) is developed for arbitrary local potentials. The resulting method is exact and differs from the usual muffin-tin formalism only in requiring an improved treatment of single centre scattering; propagation between scattering events is described by the same free-particle Green function (structure constants) which arises in the muffin-tin formalism. Detailed numerical tests are presented which demonstrate the effectiveness of the method for a model of crystalline silicon for which exact numerical solutions are available. The results indicate that earlier approximate generalizations of the theory, while helpful, remove only about 2/3 of the error introduced by the muffin-tin approximation.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering