A. Gangulee, F.M. D'Heurle
Thin Solid Films
Empirical interatomic potentials permit the calculation of structural properties and energetics of complex systems. A new approach for constructing such potentials, by explicitly incorporating the dependence of bond order on local environment, permits an improved description of covalent materials. In particular, a new potential for silicon is presented, along with results of extensive tests which suggest that this potential provides a rather realistic description of silicon. The limitations of the potential are discussed in detail. © 1988 The American Physical Society.
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R. Ghez, M.B. Small
JES