Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
For Markov chains of M/G/1 type that are not skip-free to the left, the corresponding G matrix is shown to have special structure and be determined by its first block row. An algorithm that takes advantage of this structure is developed for computing G. For non-skip-free M/G/1 type Markov chains, the algorithm significantly reduces the computational complexity of calculating the G matrix, when compared with reblocking to a system that is skip-free to the left and then applying usual iteration schemes to find G. A similar algorithm to calculate the R matrix for G/M/1 type Markov chains that are not skip-free to the right is also described.
J. LaRue, C. Ting
Proceedings of SPIE 1989
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
James Lee Hafner
Journal of Number Theory
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998