Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
A way of formulating nonlinear Steklov problems on nonsymmetric domains as an operator equation u = μPu, where P is completely continuous, is given. Local and global existence theorems then follow from standard techniques; these results extend earlier results for symmetric domains and equations with symmetric coefficients. Some miscellaneous results are given concerning the nature of the solution branches. © 1973.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
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