Naveen Shamsudhin, Nino Laeubli, et al.
PLoS ONE
We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigated using both finite-element simulations and experimental methods. Several imaging experiments are presented to illustrate the efficacy and versatility of these cantilevers. © 2012 American Institute of Physics.
Naveen Shamsudhin, Nino Laeubli, et al.
PLoS ONE
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MRS Fall Meeting 2022
Angeliki Pantazi, Simeon Furrer, et al.
ACC 2015
Abu Sebastian
IEDM 2023