Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The full spectrum of occupied and unoccupied σ and Φ orbitals is presented for solid C60, C70, and graphite, using Cls emission and absorption spectroscopy. There are significant differences between C60 and C70, and even larger changes relative to their infinite analog graphite (C∞). A comparison is made with photoemission and inverse photoemission results, along with first principles quasiparticle calculations. © 1994, Taylor & Francis Group, LLC. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Digital Discovery
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