W.C. Tang, H. Rosen, et al.
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
No abstract available.
W.C. Tang, H. Rosen, et al.
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
M.B. Small, R.M. Potemski
Proceedings of SPIE 1989
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009