Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
It has recently become feasible to compute information rates of finite-state source/channel models with not too many states. In this paper, we apply such methods to finite-state approximations of channels that are not finite-state. In this way, an upper bound and a conjectured lower bound on the information rate of the actual channel can be computed.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Igor Devetak, Andreas Winter
ISIT 2003
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997