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Characterization of a next generation step-and-scan system
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SPIE Advanced Lithography 1998
The first part of this paper is concerned with global characterizations of both the multivariate ß-spline and the multivariate truncated power function as smooth piecewise polynomials. In the second part of the paper we establish combinatorial criteria for the linear independence of multivariate ß-splines corresponding to certain configurations of knot sets. © 1983 American Mathematical Society.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
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