Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Liqun Chen, Matthias Enzmann, et al.
FC 2005
Bowen Zhou, Bing Xiang, et al.
SSST 2008
G. Ramalingam
Theoretical Computer Science