Electron-beam microcolumn technology and applications
T.H.P. Chang, M.G.R. Thomson, et al.
SPIE Optical Science, Engineering, and Instrumentation 1995
A new form of read out for high density read-only memory is presented whereby a data density of 400 bits/μm2, corresponding to 256 Gbits/in.2, can be accessed at data rates in the tens of MHz range. The technique is based on detecting the modulation in light scattering from a sharp scattering object due to the dipole-dipole coupling between the probe and surface being scanned using a sensitive homodyne interferometer. Theoretical considerations indicate that data densities in the 100 Tbits/in.2 range could be accessed at data rates of 100 MHz using this technology. © 1997 American Institute of Physics.
T.H.P. Chang, M.G.R. Thomson, et al.
SPIE Optical Science, Engineering, and Instrumentation 1995
D. Kern, K.Y. Lee, et al.
Japanese Journal of Applied Physics
Y. Mii, S. Rishton, et al.
VLSI Technology 1993
S. Rishton, K. Ismail, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures