Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The general problem of estimating the a posteriori probabilities of the states and transitions of a Markov source observed through a discrete memoryless channel is considered. The decoding of linear block and convolutional codes to minimize symbol error probability is shown to be a special case of this problem. An optimal decoding algorithm is derived. © 1974, IEEE. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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